| 000 | 00494nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a352730746X _c(hbk) |
||
| 082 |
_223 _a620.5 _bBAL |
||
| 100 | _aBaltes, H. | ||
| 245 | 0 | _aEnabling technology for mems and nanodevices | |
| 260 |
_aWeinheim: _bWiley-VCH, _c2004 |
||
| 300 |
_axii, 427 p.; _bill.: _c25 cm. |
||
| 490 | _aAdanced micro & nanosystems | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aNanotechnology | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c25675 _d25675 |
||