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| 008 | 170123s9999 xx 000 0 und d | ||
| 020 |
_a981253072X _c(hbk) |
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| 082 |
_223 _a621.38152 _bMAY |
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| 100 | _aMay, Gary S. | ||
| 245 | 0 | _aFundamentals of semiconductor fabrication | |
| 260 |
_aSingapore: _bJohn Wiley & Sons, _c2004 |
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| 300 |
_aWeekly (51/Y); _bill.: _c |
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| 700 | _aSze, Simon M. | ||
| 942 |
_2ddc _cBK |
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| 999 |
_c27215 _d27215 |
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