000			a
999			_c32445 _d32445
008			230831b xxu||||| |||| 00| 0 eng d
020			_a9783030400200
082			_a621.3815 _bTIG
100			_aTigelaar, Howard
245			_aHow transistor area shrank by 1 million fold
260			_bSpringer, _c2020 _aCham :
300			_axxiv, 319 p. ; _bill., (some color), _c25 cm
365			_b44.99 _cEUR _d94.90
504			_aIncludes bibliographical references and index.
520			_aThis book explains in laymans terms how CMOS transistors work. The author explains step-by-step how CMOS transistors are built, along with an explanation of the purpose of each process step. He describes for readers the key inventions and developments in science and engineering that overcame huge obstacles, enabling engineers to shrink transistor area by over 1 million fold and build billions of transistor switches that switch over a billion times a second, all on a piece of silicon smaller than a thumbnail. Written from a process integration point of view, in language accessible to a wide variety of readers; Provides readers with an understanding of how transistors work, how they are built, and the equipment used to build them; Describes the incredible science and engineering that was developed to keep transistor scaling on a Moores Law trajectory - (transistor area reduced by half every 2 to 3 years); Enables readers to understand the engineering choices and compromises made while scaling transistors ever smaller, with the constraints that they switch ever faster and use less and less power.
650			_aBipolar transistor
650			_aChemical mechanical polish
650			_aChemical vapor deposition
650			_aCMOS inverter
650			_aDiode capacitors
650			_aGate dielectric scaling
650			_aLithography
650			_aIntegrated circuit technology revolution
650			_aNMOS transistor
650			_aNMOS transistor
650			_aPhotoresist
650			_aPMOS transistor
650			_a P-type subsrate
650			_aSilicon dioxide
650			_aSputter deposition
650			_aTexas Instruments
650			_aTransistor gate
942			_2ddc _cBK