000			nam a22 4500
999			_c33106 _d33106
008			240319b xxu||||| |||| 00| 0 eng d
020			_a9780849311789
082			_a621.38152 _bMOY
100			_aMoyne, James
245			_aRun-to-run control in semiconductor manufacturing
260			_bCRC Press, _c2001 _aBoca Raton :
300			_a348 p. ; _bill. (some b & w), _c24 cm.
365			_b170.00 _c₤ _d109.40
504			_aIncludes bibliographical references and index.
520			_aOffers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
650			_aElectronic packaging
650			_aSemiconductor industry
650			_aProduction control
650			_aEWMA controller
650			_aProcess control
650			_aSemiconductor manufacturing;
650			_aOptimization Methods
650			_aBasic R2R Control Algorithms
650			_aFurnace Capability Improvement
650			_aProcess Recipe Optimization
700			_aDel Castillo, Enrique
700			_aHurwitz, Arnon Max
942			_2ddc _cBK