000			00553nam a2200181Ia 4500
008			161214s9999 xx 000 0 und d
020			_a0961672161 _c(hbk)
082			_223 _a621.38173 _bWOL
100			_aWolf, Stanley
245		0	_aSilicon processing for the VLSI era. Volume 1
250			_a2nd ed.
260			_aCalifornia: _bLattice Press, _c2000
300			_axxxv, 890 p.; _bill.: _c24 cm.
650			_aIntegrated circuits : very large scale integration
650			_aSemiconductors : etc.hing
700			_aTauber, Richard N.
942			_2ddc _cBK
999			_c4685 _d4685