| 000 | 00600nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a1402029284 _c(pbk) |
||
| 082 |
_223 _a681.2 _bYUR |
||
| 100 | _aYurish, Sergey Y. | ||
| 245 | 0 | _aSmart sensors and MEMS | |
| 260 |
_aDordrecht: _bKluwer Academic Publishers, _c2004 |
||
| 300 |
_axv, 480 p.; _bill.: _c24 cm. |
||
| 490 | _aNATO science series | ||
| 650 | _aDetectors -- Congresses | ||
| 650 | _aMicroelectromechanical systems -- Congresses | ||
| 650 | _aScanning systems -- Congresses | ||
| 700 | _aGomes, Maria Teresa S. R. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c4733 _d4733 |
||