| 000 | 00511nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a1584883065 _c(pbk) |
||
| 082 |
_223 _a621.3 _bPEL |
||
| 100 | _aPelesko, John A. | ||
| 245 | 0 | _aModeling MEMS and NEMS | |
| 260 |
_aBoca Raton: _bChapman & Hall, _c2002 |
||
| 300 |
_axxiii, 357 p.; _bill.: _c24 cm. |
||
| 650 | _aMEMS | ||
| 650 | _aMicroelectromechanical systems -- Mathematical models | ||
| 650 | _aNEMS | ||
| 700 | _aBernstein, David H. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c5212 _d5212 |
||