000 00495nam a2200157Ia 4500
008 161214s9999 xx 000 0 und d
020 _a3211224688
_c(hbk)
082 _223
_a621.3815
_bWAC
100 _aWachutka, Gerhard
245 0 _aSimulation of semiconductor processes and devices 2004 : SISPAD 2004
260 _aNew York:
_bSpringer,
_c2004
300 _axii, 374 p.;
_b:
_c25 cm.
650 _aSemiconductors -- Mathematical models -- congresses
700 _aSchrag, G.
942 _2ddc
_cBK
999 _c5796
_d5796