| 000 | 00493nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 161214s9999 xx 000 0 und d | ||
| 020 |
_a8181282027 _c(pbk) |
||
| 082 |
_223 _a620.5 _bFUJ |
||
| 100 | _aFujita, H. | ||
| 245 | 0 | _aMicromachines as tools for nanotechnology | |
| 260 |
_aNew York: _bSpringer-Verlag, _c2004 |
||
| 300 |
_axii, 211 p.; _bill.: _c23 cm. |
||
| 490 | _aMicrotechnology and MEMS | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aNanotechnology | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c9193 _d9193 |
||