000			00554nam a2200181Ia 4500
008			161214s9999 xx 000 0 und d
020			_a9814126942 _c(pbk)
082			_223 _a621.38152 _bGHA
100			_aGhandhi, Sorab K.
245		0	_aVLSI fabrication principles : silicon and gallium arsenide
250			_a2nd ed.
260			_aNew York: _bWiley-Interscience, _c2005
300			_axxiv, 834 p.; _bill.: _c23 cm.
650			_aGallium arsenide
650			_aIntegrated circuits -- Very large scale integration
650			_aSilicon
942			_2ddc _cBK
999			_c9998 _d9998