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Leach, Richard

Fundamental principles of engineering nanometrology. - Oxford: William Andrew, 2009 - xxvi, 321 p.; ill.: 24 cm. - Micro and nano technologies .

ISBN: 9780080964546 (hbk)

Subjects--Topical Terms:
Metrology
Microtechnology
Nanotechnology

Dewey Class. No.: 620.50287 / LEA