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Fundamental principles of engineering nanometrology.

By: Leach, Richard.
Material type: materialTypeLabelBookSeries: Micro and nano technologies.Publisher: Oxford: William Andrew, 2009Description: xxvi, 321 p.; ill.: 24 cm.ISBN: 9780080964546 .Subject(s): Metrology | Microtechnology | NanotechnologyDDC classification: 620.50287
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Item type Current location Call number Status Date due Barcode
Books 620.50287 LEA (Browse shelf) Available 024185

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