Laconte, J.
Micromachined thin-film sensors for SOI-CMOS co-integration
- Dordrecht: Springer, 2006
- xiii, 292 p.; ill., index: 25 cm.
9780387288420 (hbk)
Metal oxide semiconductors, Complementary
Gas flow
Silicon-on-insulator technology
Thin film devices
621.38152 / LAC