000 -LEADER |
fixed length control field |
00627nam a2200205Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
161214s9999 xx 000 0 und d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9780387288420 |
Terms of availability |
(hbk) |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
Item number |
LAC |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Laconte, J. |
245 #0 - TITLE STATEMENT |
Title |
Micromachined thin-film sensors for SOI-CMOS co-integration |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc |
Dordrecht: |
Name of publisher, distributor, etc |
Springer, |
Date of publication, distribution, etc |
2006 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xiii, 292 p.; |
Other physical details |
ill., index: |
Dimensions |
25 cm. |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Metal oxide semiconductors, Complementary |
|
Topical term or geographic name as entry element |
Gas flow |
|
Topical term or geographic name as entry element |
Silicon-on-insulator technology |
|
Topical term or geographic name as entry element |
Thin film devices |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Flandre, Denis |
|
Personal name |
Raskin, J. -P |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Source of classification or shelving scheme |
|
Item type |
Books |
952 ## - LOCATION AND ITEM INFORMATION (KOHA) |
-- |
090868Viva Books |