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Baglio, Salvatore

Scaling issues and design of MEMS - Chichester: John Wiley & Sons, 2007 - xiii, 229 p.; ill.: 24 cm.

ISBN: 9780470016992 (hbk)

Subjects--Topical Terms:
Microelectromechanical systems -- Design and construction

Dewey Class. No.: 620.5 / BAG

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