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Scaling issues and design of MEMS

By: Baglio, Salvatore.
Contributor(s): Castorina, Salvatore | Savalli, Nicolo.
Material type: materialTypeLabelBookPublisher: Chichester: John Wiley & Sons, 2007Description: xiii, 229 p.; ill.: 24 cm.ISBN: 9780470016992 .Subject(s): Microelectromechanical systems -- Design and constructionDDC classification: 620.5
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Item type Current location Call number Status Date due Barcode
Books 620.5 BAG (Browse shelf) Available 018999

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