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1.
Fundamentals of microfabrication : the science of miniaturization

by Madou, Marc J.

Edition: 2nd ed.Material type: book Book; Format: print ; Literary form: Not fiction Publisher: London: CRC Press, 2002Availability: Items available for loan: [Call number: 621.38152 MAD] (1).
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2.
MEMS/NEMS : handbook techniques and applications

by Leondes, Cornelius T.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: New York Springer 2006Availability: Items available for loan: [Call number: 620.5 LEO] (5).
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3.
Scaling issues and design of MEMS

by Baglio, Salvatore | Castorina, Salvatore | Savalli, Nicolo.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Chichester: John Wiley & Sons, 2007Availability: Items available for loan: [Call number: 620.5 BAG] (1).
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4.
Fabrication and design of resonant microdevices

by Bahreyni, Behraad.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Norwich: William Andrew, 2008Availability: Items available for loan: [Call number: 621 BAH] (1).
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5.
Design and fabrication of self-powered micro-harvesters : rotating and vibrating micro-power systems

by Pan, C. T.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Singapore: John Wiley & Sons, 2014Availability: Items available for loan: [Call number: 621.313 PAN] (1).
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