MEMS/NEMS : handbook techniques and applications
By: Leondes, Cornelius T.
Material type:
BookPublisher: New York Springer 2006Description: xviii, 380 p. ill. 24 cm.ISBN: 9780387245201 .Subject(s): Microelectromechanical systems -- Design and construction | NanotechnologyDDC classification: 620.5
| Item type | Current location | Call number | Vol info | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| Books | 620.5 LEO (Browse shelf) | Vol.1. Design methods | Available | 015523 | ||
| Books | 620.5 LEO (Browse shelf) | Vol.2. Fabrication techniques | Available | 015524 | ||
| Books | 620.5 LEO (Browse shelf) | Vol.3. Manufacturing methods | Available | 015525 | ||
| Books | 620.5 LEO (Browse shelf) | Vol.4. Sensors and actuators | Available | 015526 | ||
| Books | 620.5 LEO (Browse shelf) | Vol.5. Medical applications and MOEMS | Available | 015527 |
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