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Fabrication and design of resonant microdevices

By: Bahreyni, Behraad.
Material type: materialTypeLabelBookSeries: Micro & nano technologies.Publisher: Norwich: William Andrew, 2008Description: xiii, 181 p.; ill.: 27 cm.ISBN: 9780815515777 .Subject(s): Microelectromechanical systems -- Design and construction | Microfabrication | ResonanceDDC classification: 621
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Item type Current location Call number Status Date due Barcode
Books 621 BAH (Browse shelf) Available 022836

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