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Fundamentals of microfabrication : the science of miniaturization

By: Madou, Marc J.

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BookPublisher: London: CRC Press, 2002Edition: 2nd ed.Description: 723 p.; ill.: 29 cm.ISBN: 0849308267 .Subject(s): Integrated circuits -- Design and construction | Machining | Microelectromechanical systems -- Design and construction | Microelectronic packaging | MicroelectronicsDDC classification: 621.38152

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Item type	Current location	Call number	Status	Date due	Barcode
Books		621.38152 MAD (Browse shelf)	Available		011051

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