1. Fundamentals of microfabrication : the science of miniaturization

by Madou, Marc J.

Edition: 2nd ed.Material type: book Book; Format: print ; Literary form: Not fiction Publisher: London: CRC Press, 2002Availability: Items available for loan: [Call number: 621.38152 MAD] (1).
2. Practice of machine design

by Hatamura, Yotaro | Yamamoto, Yoshio.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: New York: Oxford University Press, 1999Availability: Items available for loan: [Call number: 621.815 HAT] (1).

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