Run-to-run control in semiconductor manufacturing
- Boca Raton : CRC Press, 2001
- 348 p. ; ill. (some b & w), 24 cm.
Includes bibliographical references and index.
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
9780849311789
Electronic packaging Semiconductor industry Production control EWMA controller Process control Semiconductor manufacturing; Optimization Methods Basic R2R Control Algorithms Furnace Capability Improvement Process Recipe Optimization