| 000 -LEADER |
|---|
| fixed length control field |
nam a22 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
240319b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780849311789 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
MOY |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Moyne, James |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Run-to-run control in semiconductor manufacturing |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher, distributor, etc |
CRC Press, |
| Date of publication, distribution, etc |
2001 |
| Place of publication, distribution, etc |
Boca Raton : |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
348 p. ; |
| Other physical details |
ill. (some b & w), |
| Dimensions |
24 cm. |
| 365 ## - TRADE PRICE |
|---|
| Price amount |
170.00 |
| Price type code |
₤ |
| Unit of pricing |
109.40 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Electronic packaging |
|
|---|
| Topical term or geographic name as entry element |
Semiconductor industry |
|
|---|
| Topical term or geographic name as entry element |
Production control |
|
|---|
| Topical term or geographic name as entry element |
EWMA controller |
|
|---|
| Topical term or geographic name as entry element |
Process control |
|
|---|
| Topical term or geographic name as entry element |
Semiconductor manufacturing; |
|
|---|
| Topical term or geographic name as entry element |
Optimization Methods |
|
|---|
| Topical term or geographic name as entry element |
Basic R2R Control Algorithms |
|
|---|
| Topical term or geographic name as entry element |
Furnace Capability Improvement |
|
|---|
| Topical term or geographic name as entry element |
Process Recipe Optimization |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Del Castillo, Enrique |
|
|---|
| Personal name |
Hurwitz, Arnon Max |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Item type |
Books |