| 000 -LEADER |
|---|
| fixed length control field |
00539nam a2200169Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
161214s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780815515944 |
| Terms of availability |
(hbk) |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
LIN |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lindroos, Veikko |
| 245 #0 - TITLE STATEMENT |
|---|
| Title |
Handbook of silicon based MEMS : materials and technologies |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Norwich: |
| Name of publisher, distributor, etc |
Elsevier, |
| Date of publication, distribution, etc |
2010 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
636 p.; |
| Other physical details |
ill.: |
| Dimensions |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems |
|
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems -- Materials |
|
|---|
| Topical term or geographic name as entry element |
Silicon -- Electric properties |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Item type |
Books |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) |
|---|
| -- |
085779Transaction Publishers |