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Handbook of silicon based MEMS : materials and technologies

By: Lindroos, Veikko.
Material type: materialTypeLabelBookPublisher: Norwich: Elsevier, 2010Description: 636 p.; ill.ISBN: 9780815515944 .Subject(s): Microelectromechanical systems | Microelectromechanical systems -- Materials | Silicon -- Electric propertiesDDC classification: 621.38152
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Item type Current location Call number Status Date due Barcode
Books 621.38152 LIN (Browse shelf) Available 024492

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