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Process engineering analysis in semiconductor device fabrication

By: Middleman, Stanley.
Contributor(s): Hochberg, Arthur K.
Material type: materialTypeLabelBookSeries: McGraw-Hill chemical engineering series.Publisher: New York: McGraw-Hill, 1993Description: xvii, 774 p.; ill.: 25 cm.ISBN: 9780070418530 .Subject(s): Semiconductors : Design and constructionDDC classification: 621.38152
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