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Introduction to microelectronic fabrication, Volume 5

By: Jaeger, Richard C.
Material type: materialTypeLabelBookSeries: Modular series on solid state deices.Publisher: New Jersey: Prentice Hall, 2002Edition: 2nd ed.Description: 316 p.; Illus. Index.: 23 cm.ISBN: 0201444947 .Subject(s): Defusion | Ion Implantation | Lithography | Microelectronic Fabrication | Packaging and YieldDDC classification: 621.3815
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