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Silicon processing for the VLSI era. Volume 2

By: Wolf, Stanley.
Material type: materialTypeLabelBookPublisher: California: Lattice Press, 1990Description: xxxi, 753 p.; ill.: 24 cm.ISBN: 9780961672140 .Subject(s): Integrated circuits : Very large scale | Semiconductors : etc.hingDDC classification: 621.38173
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