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Semiconductor manufacturing technology

By: Yoo, Chue San.
Material type: materialTypeLabelBookSeries: Adanced series in electrical and computer engineering.Publisher: Singapore: World Scientific, 2008Description: xii, 470 p.; ill.: 24 cm.ISBN: 9789812568236 .Subject(s): Semiconductor industry | Semiconductors -- Design and constructionDDC classification: 621.38152
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