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MEMS mechanical sensors

By: Ensell, Graham.
Contributor(s): Kraft, Michael | White, Neil.
Material type: materialTypeLabelBookSeries: Microelectromechanical systems series.Publisher: Boston: Artech House, 2004Description: x, 269 p.; : 26 cm.ISBN: 1580535364 .Subject(s): Beeby, Stephen | Ensell, Graham | Kraft, Michael | Microelectricalmechanical systems -- Design and construction | TransducersDDC classification: 681.2
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