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1.
Microsystem Design

by Senturia, Stephen D.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: London: Kluwer Academic Publishers, 2001Availability: Items available for loan: [Call number: 621.381 SEN] (1).
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2.
Fabrication and design of resonant microdevices

by Bahreyni, Behraad.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Norwich: William Andrew, 2008Availability: Items available for loan: [Call number: 621 BAH] (1).
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