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Availability
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Authors
Chandler, P. J.
Jaeger, Richard C.
Townsend, P. D.
Zhang, L.
Item types
Books
Series
Cambridge studies in...
Modular series on so...
Topics
Defusion
Ion implantation
Ion Implantation
Lithography
Microelectronic Fabr...
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Your query retrived 2 records.
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1.
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Introduction to microelectronic fabrication, Volume 5
by
Jaeger, Richard C.
Edition:
2nd ed.
Material type:
Book
; Format:
print
; Literary form:
Not fiction
Publisher:
New Jersey: Prentice Hall, 2002
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2.
Optical effects of ion implantation
by
Townsend, P. D
|
Chandler, P. J
|
Zhang, L.
Material type:
Book
; Format:
print
; Literary form:
Not fiction
Publisher:
Cambridge: Cambridge University Press, 1994
Availability:
Items available for loan:
[
Call number:
621.36 TOW] (1).
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