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Details for: Fabrication and design of resonant microdevices
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Fabrication and design of resonant microdevices
By:
Bahreyni, Behraad
.
Material type:
Book
Series:
Micro & nano technologies
.
Publisher:
Norwich:
William Andrew,
2008
Description:
xiii, 181 p.; ill.: 27 cm
.
ISBN:
9780815515777 .
Subject(s):
Microelectromechanical systems -- Design and construction
|
Microfabrication
|
Resonance
DDC classification:
621
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