Handbook of silicon based MEMS : materials and technologies
By: Lindroos, Veikko.
Material type:
BookPublisher: Norwich: Elsevier, 2010Description: 636 p.; ill.ISBN: 9780815515944 .Subject(s): Microelectromechanical systems | Microelectromechanical systems -- Materials | Silicon -- Electric propertiesDDC classification: 621.38152
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| Books | 621.38152 LIN (Browse shelf) | Available | 024492 |
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