Run-to-run control in semiconductor manufacturing
By: Moyne, James.
Contributor(s): Del Castillo, Enrique | Hurwitz, Arnon Max.
Material type:
BookPublisher: Boca Raton : CRC Press, 2001Description: 348 p. ; ill. (some b & w), 24 cm.ISBN: 9780849311789.Subject(s): Electronic packaging | Semiconductor industry | Production control | EWMA controller | Process control | Semiconductor manufacturing | Optimization Methods | Basic R2R Control Algorithms | Furnace Capability Improvement | Process Recipe OptimizationDDC classification: 621.38152 Summary: Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| Books | 621.38152 MOY (Browse shelf) | Available | 034898 |
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| 621.38152 MAY Fundamentals of semiconductor fabrication | 621.38152 MIC Single semiconductor quantum dots | 621.38152 MID Process engineering analysis in semiconductor device fabrication | 621.38152 MOY Run-to-run control in semiconductor manufacturing | 621.38152 NAG Microelectronic devices | 621.38152 NAG Microelectronic devices | 621.38152 NAG Microelectronic devices |
Includes bibliographical references and index.
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
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