Micromachined thin-film sensors for SOI-CMOS co-integration
By: Laconte, J.
Contributor(s): Flandre, Denis | Raskin, J. -P.
Material type:
BookPublisher: Dordrecht: Springer, 2006Description: xiii, 292 p.; ill., index: 25 cm.ISBN: 9780387288420 .Subject(s): Metal oxide semiconductors, Complementary | Gas flow | Silicon-on-insulator technology | Thin film devicesDDC classification: 621.38152
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| Books | 621.38152 LAC (Browse shelf) | Available | 014734 |
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