Fundamentals of microfabrication : the science of miniaturization
By: Madou, Marc J.
Material type:
BookPublisher: London: CRC Press, 2002Edition: 2nd ed.Description: 723 p.; ill.: 29 cm.ISBN: 0849308267 .Subject(s): Integrated circuits -- Design and construction | Machining | Microelectromechanical systems -- Design and construction | Microelectronic packaging | MicroelectronicsDDC classification: 621.38152
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| Books | 621.38152 MAD (Browse shelf) | Available | 011051 |
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| 621.38152 LIN Handbook of silicon based MEMS : materials and technologies | 621.38152 LIN Fundamentals of semiconductor devices | 621.38152 LOY Emerging optoelectronic technologies and applications | 621.38152 MAD Fundamentals of microfabrication : the science of miniaturization | 621.38152 MAR Essentials of semiconductor device physics | 621.38152 MAY Fundamentals of semiconductor fabrication | 621.38152 MIC Single semiconductor quantum dots |
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